Structural and optical characterization of sprayed ZnS thin films

Tatjana Dedova; Arvo Mere; Malle Krunks; Olga Kijatkina; Ilona Oja; Olga Volobujeva

doi:10.1117/12.639065

12 June 2006 Structural and optical characterization of sprayed ZnS thin films

Tatjana Dedova, Arvo Mere, Malle Krunks, Olga Kijatkina, Ilona Oja, Olga Volobujeva

Proceedings Volume 5946, Optical Materials and Applications; 594605 (2006) https://doi.org/10.1117/12.639065
Event: Optical Materials and Applications, 2005, Tartu, Estonia

Abstract

The cost-effective spray pyrolysis technique was applied to prepare ZnS thin films for large-scale applications. Aqueous solutions containing ZnCl₂ and SC(NH₂)₂ were deposited onto glass and n-type Si(100) substrates at 430-600°C. The structure and phase composition were studied by XRD and FTIR, the surface morphology by SEM. The optical properties were determined from the transmittance and reflectance measurements in the UV-visible and near-IR regions. The phase composition, crystallinity, and surface morphology of the films could be controlled by the Zn:S molar ratio in the stock solution and the deposition temperature. Highly (001) oriented ZnS films with wurtzite structure were grown at temperatures above 500°C using the Zn:S molar ratio 1:2 in the solution. The sprayed films had high optical transmittance in a wide spectral range and the refractive index of up to 1.9 at 632.8 nm. It was also found that the sprayed ZnS films are capable of being used as antireflection coatings in Si-based devices.

Citation Download Citation

Tatjana Dedova, Arvo Mere, Malle Krunks, Olga Kijatkina, Ilona Oja, and Olga Volobujeva "Structural and optical characterization of sprayed ZnS thin films", Proc. SPIE 5946, Optical Materials and Applications, 594605 (12 June 2006); https://doi.org/10.1117/12.639065

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