Paper
20 February 2009 Noninvasive subsurface analyzing technique using multiple miniaturized Raman probes
Yuko S. Yamamoto, Yuichi Komachi, Hideyuki Shinzawa, Atsushi Maruyama, Bibin B. Andriana, Yuji Matsuura, Yukihiro Ozaki, Hidetoshi Sato
Author Affiliations +
Abstract
The optical property of the ball lens mounted hollow optical fiber Raman probe (BHRP) is studied in the present study. Since the ball lens has rather large aberration, the focus of the BHRP is dispersed and the spatial resolution in depth direction goes low. The spatial dispersion of the focal point was evaluated using model samples. The BHRP equipped a sapphire ball lens of 500 μm diameter was employed. Layered samples consisting of a polymethyl methacrylate (PMMA) substrate and various thicknesses of polyethylene (PE) films were measured with the BHRP. The relative band intensities of the upper and the lower layers appear at different rates in the obtained spectra, reflecting the optical properties of the probe. According to the spectra, the optical dispersion of the focal point is estimated. The result suggests that the spatial dispersion of the focus point fitted to Gaussian distribution. The working distance (WD) is 53 μm and the FWHM of the fitted Gauss distribution is 64 μm.
© (2009) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Yuko S. Yamamoto, Yuichi Komachi, Hideyuki Shinzawa, Atsushi Maruyama, Bibin B. Andriana, Yuji Matsuura, Yukihiro Ozaki, and Hidetoshi Sato "Noninvasive subsurface analyzing technique using multiple miniaturized Raman probes", Proc. SPIE 7173, Optical Fibers and Sensors for Medical Diagnostics and Treatment Applications IX, 71730T (20 February 2009); https://doi.org/10.1117/12.809346
Advertisement
Advertisement
RIGHTS & PERMISSIONS
Get copyright permission  Get copyright permission on Copyright Marketplace
KEYWORDS
Raman spectroscopy

Optical properties

Polymethylmethacrylate

Semiconducting wafers

Statistical modeling

Silicon

3D modeling

Back to Top