Full Content is available to subscribers

Subscribe/Learn More  >
Proceedings Article

Simultaneous measurement of film surface topography and thickness variation using white-light interferometry

[+] Author Affiliations
Katsuichi Kitagawa

Toray Engineering Co., Ltd. (Japan)

Proc. SPIE 6375, Optomechatronic Sensors, Instrumentation, and Computer-Vision Systems, 637507 (October 12, 2006); doi:10.1117/12.688109
Text Size: A A A
From Conference Volume 6375

  • Optomechatronic Sensors, Instrumentation, and Computer-Vision Systems
  • Yasuhiro Takaya; Jonathan Kofman
  • Boston, MA | October 01, 2006

abstract

In vertical scanning white-light interferometry, two peaks appear in the interference waveform if a transparent film exists on the surface to be measured. We have developed an algorithm that is able to detect the position of these peaks quickly and accurately, and have put into practical use a film profiler that is able to simultaneously measure the profiles of both the front and back surfaces and the thickness distribution of a transparent film. This technique is applicable to transparent films with an optical thickness of approximately 1 μm or greater, and it is used effectively in the semiconductor and LCD manufacturing processes.

© (2006) COPYRIGHT SPIE--The International Society for Optical Engineering. Downloading of the abstract is permitted for personal use only.
Citation

Katsuichi Kitagawa
"Simultaneous measurement of film surface topography and thickness variation using white-light interferometry", Proc. SPIE 6375, Optomechatronic Sensors, Instrumentation, and Computer-Vision Systems, 637507 (October 12, 2006); doi:10.1117/12.688109; http://dx.doi.org/10.1117/12.688109


Access This Proceeding
Sign in or Create a personal account to Buy this proceeding ($15 for members, $18 for non-members).

Figures

Tables

NOTE:
Citing articles are presented as examples only. In non-demo SCM6 implementation, integration with CrossRef’s "Cited By" API will populate this tab (http://www.crossref.org/citedby.html).

Some tools below are only available to our subscribers or users with an online account.

Related Content

Customize your page view by dragging & repositioning the boxes below.

Related Book Chapters

Topic Collections

Advertisement
  • Don't have an account?
  • Subscribe to the SPIE Digital Library
  • Create a FREE account to sign up for Digital Library content alerts and gain access to institutional subscriptions remotely.
Access This Proceeding
Sign in or Create a personal account to Buy this proceeding ($15 for members, $18 for non-members).
Access This Proceeding
Sign in or Create a personal account to Buy this article ($15 for members, $18 for non-members).
Access This Chapter

Access to SPIE eBooks is limited to subscribing institutions and is not available as part of a personal subscription. Print or electronic versions of individual SPIE books may be purchased via SPIE.org.