The synthesis and properties of nano-SnO2 thin film by sol-gel

Sumei Qin; Ziyang Tong; Ming Guo; Hongmei Deng; Pingxiong Yang

doi:10.1117/12.792631

11 March 2008 The synthesis and properties of nano-SnO₂ thin film by sol-gel

Sumei Qin, Ziyang Tong, Ming Guo, Hongmei Deng, Pingxiong Yang

Proceedings Volume 6984, Sixth International Conference on Thin Film Physics and Applications; 69841M (2008) https://doi.org/10.1117/12.792631
Event: Sixth International Conference on Thin Film Physics and Applications, 2007, Shanghai, China

Abstract

Tin oxide nano-films with different grain-diameter have been synthesized by the modified sol-gel method, used tin chloride dihydrate (SnCl₂•2H₂O) as main materials and ethanol as solvent. After magnetic agitation and ageing, tin oxide (SnO₂) thin films were prepared on silicon substrates by spin-coat process and then annealed at different temperature in oxygen atmosphere. The obtained samples are polycrystalline films with rutile structure and have preferred orientation of (110) direction. The crystal structure, the morphology, and the optical property of the thin films were characterized by X-ray diffraction (XRD), scanning electron microscopy (SEM), Fourier Transform Infrared Spectrometer (FT-IR).

Citation Download Citation

Sumei Qin, Ziyang Tong, Ming Guo, Hongmei Deng, and Pingxiong Yang "The synthesis and properties of nano-SnO₂ thin film by sol-gel", Proc. SPIE 6984, Sixth International Conference on Thin Film Physics and Applications, 69841M (11 March 2008); https://doi.org/10.1117/12.792631

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