Growth and characterization of Li-doped ZnO thin films on nanocrystalline diamond substrates

Jian Huang; Yiben Xia; Linjun Wang; Jinyong Xu; Guang Hu; Xuefeng Zhu; Weimin Shi

doi:10.1117/12.792639

11 March 2008 Growth and characterization of Li-doped ZnO thin films on nanocrystalline diamond substrates

Jian Huang, Yiben Xia, Linjun Wang, Jinyong Xu, Guang Hu, Xuefeng Zhu, Weimin Shi

Proceedings Volume 6984, Sixth International Conference on Thin Film Physics and Applications; 69841T (2008) https://doi.org/10.1117/12.792639
Event: Sixth International Conference on Thin Film Physics and Applications, 2007, Shanghai, China

Abstract

Nanocrystalline diamond(NCD) films with a mean surface roughness of 23.8 nm were grown on silicon substrates in a hot filament chemical vapor deposition(HFCVD) system. Then, Zn_1-xLi_xO (x=0, 0.05, 0.10, 0.15) films were deposited on these NCD films by radio-frequency(RF) reactive magnetron sputtering method. When x was 0.1, the Li-doped ZnO film had a larger resistivity more than 10⁸Ω•cm obtained from Hall effect measurement. All the Zn_1-xLi_xO films had a strong c-axis orientation structure determined by X-ray diffraction (XRD). The above results suggested that the Li-doped ZnO film/NCD structure prepared in this work was attractive for the application of high frequency surface acoustic wave (SAW) devices.

Citation Download Citation

Jian Huang, Yiben Xia, Linjun Wang, Jinyong Xu, Guang Hu, Xuefeng Zhu, and Weimin Shi "Growth and characterization of Li-doped ZnO thin films on nanocrystalline diamond substrates", Proc. SPIE 6984, Sixth International Conference on Thin Film Physics and Applications, 69841T (11 March 2008); https://doi.org/10.1117/12.792639

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