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Proceedings Article

Multiscale modeling of phase changes during femtosecond laser metal interaction

[+] Author Affiliations
Xin Li, Lan Jiang

Beijing Institute of Technology (China)

Hai-Lung Tsai

Missouri Univ. of Science and Technology (USA)

Proc. SPIE 7202, Laser-based Micro- and Nanopackaging and Assembly III, 72020B (February 24, 2009); doi:10.1117/12.810022
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From Conference Volume 7202

  • Laser-based Micro- and Nanopackaging and Assembly III
  • Wilhelm Pfleging; Yongfeng Lu; Kunihiko Washio; Willem Hoving; Jun Amako
  • San Jose, CA | January 24, 2009

abstract

A multiscale model is developed to study to the femtosecond laser single pulse and pulse train processing of the metal films. In our model, molecular dynamics simulation combined with the improved two-temperature model is employed in the ablation area and the improved two-temperature model is applied in heat-affected zone. This paper extends the improved two-temperature model to describe higher laser fluences processing by introducing the phase change. The phase change mechanisms of the non-equilibrium thermal melting and vaporization are both analyzed, which has a strong impact on the lattice temperature evaluation. The model can simulate phase change process of gold with higher accuracy. It is demonstrated that the pulse train could improve the fabrication accuracy, repeatability, and controllability.

© (2009) COPYRIGHT SPIE--The International Society for Optical Engineering. Downloading of the abstract is permitted for personal use only.
Citation

Xin Li ; Lan Jiang and Hai-Lung Tsai
"Multiscale modeling of phase changes during femtosecond laser metal interaction", Proc. SPIE 7202, Laser-based Micro- and Nanopackaging and Assembly III, 72020B (February 24, 2009); doi:10.1117/12.810022; http://dx.doi.org/10.1117/12.810022


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