Effect of substrate temperature and ion assistance on nanosecond laser-induced damage threshold in high reflection dielectric coatings

A. Melninkaitis; D. Mikšys; T. Balčiūnas; V. Sirutkaitis; A. Skrebutėnas; R. Buzelis; R. Drazdys; G. Abromavičius

doi:10.1117/12.638775

7 February 2006 Effect of substrate temperature and ion assistance on nanosecond laser-induced damage threshold in high reflection dielectric coatings

A. Melninkaitis, D. Mikšys, T. Balčiūnas, V. Sirutkaitis, A. Skrebutėnas, R. Buzelis, R. Drazdys, G. Abromavičius

Author Affiliations +

Proceedings Volume 5991, Laser-Induced Damage in Optical Materials: 2005; 59911B (2006) https://doi.org/10.1117/12.638775
Event: Boulder Damage Symposium XXXVII: Annual Symposium on Optical Materials for High Power Lasers, 2005, Boulder, CO, United States

Abstract

An influence of substrate temperature and working gas in coating plant during evaporation process on the laser-induced damage threshold (LIDT) of high reflection dielectric coatings was experimentally investigated. Also a LIDT comparison of ion assisted deposition (IAD) and conventional electron-beam evaporation (non-IAD) coatings fabricated under the same substrate temperature (300 °C) was performed. A set of different type high reflection mirrors were tested for LIDT at 532 nm for 3.4 ns pulses: one type of non-IAD and six types of IAD evaporated at different substrate temperatures and different working gases. All coatings were made on BK7 glass substrates from ZrO₂ and SiO₂. The computer controlled test station for LIDT measurements according to the requirements of current ISO 11254-2 standard was used. All measurements were performed at 10 Hz pulse repetition rate (S-on-1 test). The tests were performed at fixed spot size. Strong LIDT dependence on substrate temperature of was observed.

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A. Melninkaitis, D. Mikšys, T. Balčiūnas, V. Sirutkaitis, A. Skrebutėnas, R. Buzelis, R. Drazdys, and G. Abromavičius "Effect of substrate temperature and ion assistance on nanosecond laser-induced damage threshold in high reflection dielectric coatings", Proc. SPIE 5991, Laser-Induced Damage in Optical Materials: 2005, 59911B (7 February 2006); https://doi.org/10.1117/12.638775

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