Advanced microbolometer detectors for a next-generation uncooled FPA for space-based thermal remote sensing

Fraser Williamson; Linda Marchese; Georges Baldenberger; François Châteauneuf; Francis Provencal; Jean-Sol Caron; Fabien Dupont; Jocelyne Osouf; Patrick Couture; Linh Ngo Phong; Tim Pope

doi:10.1117/12.810026

23 February 2009 Advanced microbolometer detectors for a next-generation uncooled FPA for space-based thermal remote sensing

Fraser Williamson, Linda Marchese, Georges Baldenberger, François Châteauneuf, Francis Provencal, Jean-Sol Caron, Fabien Dupont, Jocelyne Osouf, Patrick Couture, Linh Ngo Phong, Tim Pope

Author Affiliations +

Proceedings Volume 7208, MOEMS and Miniaturized Systems VIII; 72080J (2009) https://doi.org/10.1117/12.810026
Event: SPIE MOEMS-MEMS: Micro- and Nanofabrication, 2009, San Jose, California, United States

Abstract

INO has established a VOx-based uncooled microbolometer detector technology and an expertise in the development of custom detectors and focal plane arrays. Thanks to their low power consumption and broadband sensitivity, uncooled microbolometer detectors are finding an increased number of applications in the field of space-based thermal remote sensing. A mission requirement study has identified at least seven applications with a need for data in the MWIR (3-8 μm), LWIR (8-15 μm) and or FIR (15-100 μm) wavelength bands. The requirement study points to the need for two main classes of uncooled thermal detectors, the first requiring small and fast detectors for MWIR and LWIR imaging with small ground sampling distance, and the second requiring larger detectors with sensitivity out to the FIR. In this paper, the simulation, design, microfabrication and radiometric testing of detectors for these two classes of requirements will be presented. The performance of the experimental detectors closely approach the mission requirements and show the potential of microbolometer technology to fulfill the requirements of future space based thermal imaging missions.

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Fraser Williamson, Linda Marchese, Georges Baldenberger, François Châteauneuf, Francis Provencal, Jean-Sol Caron, Fabien Dupont, Jocelyne Osouf, Patrick Couture, Linh Ngo Phong, and Tim Pope "Advanced microbolometer detectors for a next-generation uncooled FPA for space-based thermal remote sensing", Proc. SPIE 7208, MOEMS and Miniaturized Systems VIII, 72080J (23 February 2009); https://doi.org/10.1117/12.810026

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