Linear micromirror array for broadband femtosecond pulse shaping in phase and amplitude

Stefan M. Weber; Severin Waldis; Wilfried Noell; Denis Kiselev; Jérôme Extermann; Luigi Bonacina; Jean-Pierre Wolf; Nico F. de Rooij

doi:10.1117/12.808162

18 February 2009 Linear micromirror array for broadband femtosecond pulse shaping in phase and amplitude

Stefan M. Weber, Severin Waldis, Wilfried Noell, Denis Kiselev, Jérôme Extermann, Luigi Bonacina, Jean-Pierre Wolf, Nico F. de Rooij

Author Affiliations +

Proceedings Volume 7208, MOEMS and Miniaturized Systems VIII; 720805 (2009) https://doi.org/10.1117/12.808162
Event: SPIE MOEMS-MEMS: Micro- and Nanofabrication, 2009, San Jose, California, United States

Abstract

We are developing a linear array of micromirrors designed for optical, femtosecond laser pulse shaping. It is a bulkmicromachined device, capable of retarding or diminishing certain laser frequencies in order to perform phase and amplitude modulation within a frequency band spanning the UV to the near-infrared. The design consists of a linear array of mirrors fixed on either side by springs. They feature two degrees of freedom: Out-of-plane motion for phase shifting and rotational motion for binary amplitude modulation, both realized using vertical comb drives. The first applications will include femtosecond discrimination experiments on biomolecules.

Citation Download Citation

Stefan M. Weber, Severin Waldis, Wilfried Noell, Denis Kiselev, Jérôme Extermann, Luigi Bonacina, Jean-Pierre Wolf, and Nico F. de Rooij "Linear micromirror array for broadband femtosecond pulse shaping in phase and amplitude", Proc. SPIE 7208, MOEMS and Miniaturized Systems VIII, 720805 (18 February 2009); https://doi.org/10.1117/12.808162

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