Paper
14 February 2009 Dynamic high-resolution patterning for biomedical, materials, and semiconductor research
Harold R. Garner, Amruta Joshi, Sandhya N. Mitnala, Michael L. Huebschman, Surya Shandy, Brandi Wallek, Season Wong
Author Affiliations +
Abstract
By combining unique light sources, a Texas Instruments DLP system and a microscope, a submicron dynamic patterning system has been created. This system has a resolution of 0.5 microns, and can illuminate with rapidly changing patterns of visible, UV or pulsed laser light. This system has been used to create digital masks for the production of micron scale electronic test circuits and has been used in biological applications. Specifically we have directed light on a sub-organelle scale to cells to control their morphology and motility with applications to tissue engineering, cell biology, drug discovery and neurology.
© (2009) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Harold R. Garner, Amruta Joshi, Sandhya N. Mitnala, Michael L. Huebschman, Surya Shandy, Brandi Wallek, and Season Wong "Dynamic high-resolution patterning for biomedical, materials, and semiconductor research", Proc. SPIE 7210, Emerging Digital Micromirror Device Based Systems and Applications, 721002 (14 February 2009); https://doi.org/10.1117/12.809122
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KEYWORDS
Digital micromirror devices

Optical lithography

Light sources

Microscopes

Ultraviolet radiation

Digital Light Processing

Image resolution

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