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Proceedings Article

Silicon slot waveguides for nonlinear optics

[+] Author Affiliations
A. Säynätjoki, L. Karvonen, A. Khanna, T. Alasaarela, S. Honkanen

Helsinki Univ. of Technology (Finland)

A. Tervonen

Helsinki Univ. of Technology (Finland) and Luxdyne Ltd. (Finland)

Proc. SPIE 7212, Optical Components and Materials VI, 72120T (February 06, 2009); doi:10.1117/12.812974
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From Conference Volume 7212

  • Optical Components and Materials VI
  • Shibin Jiang; Michel J. F. Digonnet; John W. Glesener; J. Christopher Dries
  • San Jose, CA | January 24, 2009

abstract

Slot waveguides are designed for silicon-based nonlinear optics. The critical processes in manufacturing such waveguides are lithography, etching and slot filling. Their effects on the properties of the waveguides are studied.

© (2009) COPYRIGHT SPIE--The International Society for Optical Engineering. Downloading of the abstract is permitted for personal use only.
Citation

A. Säynätjoki ; L. Karvonen ; A. Khanna ; T. Alasaarela ; A. Tervonen, et al.
"Silicon slot waveguides for nonlinear optics", Proc. SPIE 7212, Optical Components and Materials VI, 72120T (February 06, 2009); doi:10.1117/12.812974; http://dx.doi.org/10.1117/12.812974


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