Magnetic actuated FR4 scanners for compact spectrometers

Çağlar Ataman; Hakan Urey

doi:10.1117/12.785375

24 April 2008 Magnetic actuated FR4 scanners for compact spectrometers

Çağlar Ataman, Hakan Urey

Proceedings Volume 6993, MEMS, MOEMS, and Micromachining III; 699303 (2008) https://doi.org/10.1117/12.785375
Event: SPIE Photonics Europe, 2008, Strasbourg, France

Abstract

A novel magnetic actuated polymer optical platform is integrated into a Michelson interferometer type Fourier transform infrared spectrometer. The proposed advantages of the novel platform over existing approaches, such as MEMS spectrometers, or bulky FTIR systems, include millimeter range dimensions providing a large clear aperture and enabling conventional machining for device fabrication, a controllable AC and/or DC motion both in rotational and translational modes, and low frequency operation. It has been demonstrated that the platform is capable of achieving 400μm DC deflection in ambient pressure in the translational mode, and a total optical scan angle exceeding 60 degrees in the resonant rotational mode. A Michelson type Fourier transform spectrometer was built using a retro-reflector bearing FR4 platform and a spectral resolution of 25cm^-1 is demonstrated with this setup. In addition, possible use of the same platform in various other spectrometer configurations and methods to improve the motion precision are discussed.

Citation Download Citation

Çağlar Ataman and Hakan Urey "Magnetic actuated FR4 scanners for compact spectrometers", Proc. SPIE 6993, MEMS, MOEMS, and Micromachining III, 699303 (24 April 2008); https://doi.org/10.1117/12.785375

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