Full Content is available to subscribers

Subscribe/Learn More  >
Proceedings Article

Micromachined multicavity grey body emitter for the use in MIR spectroscopic systems

[+] Author Affiliations
J. Hildenbrand, A. Kürzinger, E. Moretton, A. Lambrecht, J. Wöllenstein

Fraunhofer-Institute for Physical Measurement Technique (Germany)

A. Greiner, J. G. Korvink

Univ. of Freiburg (Germany)

Proc. SPIE 6993, MEMS, MOEMS, and Micromachining III, 699304 (April 24, 2008); doi:10.1117/12.780859
Text Size: A A A
From Conference Volume 6993

  • MEMS, MOEMS, and Micromachining III
  • Hakan Urey
  • Strasbourg, France | April 07, 2008

abstract

A grey body emitter based on a microcavity array with Pt-heater on the backside is presented. The microcavity array is made by electro-chemical etching of silicon. It has been shown in a previous work, that this emitter has especially in the spectral region >8 μm significantly higher emissivity than commercial available emitters. Due to the thin-film technology of MEMS-based emitters, these types can be typically operated with a maximum temperature of 700°C to 800°C. Higher temperature causes degradation of the heater. But higher temperatures also mean an enhancement in radiation power and thus open a wider area of application. The presented work shows a temperature enhanced thermal emitter with a ceramic heater passivation. Short time tests show the possibility of a maximum temperature of 1000°C. The part of light emitted by the microcavities in comparison to the whole device as well as the influence of the pore size concerning the emitted spectral range is investigated. The results are the basis for a redesign of the microcavity array for an enhancement of the geometry tuned emissivity.

© (2008) COPYRIGHT SPIE--The International Society for Optical Engineering. Downloading of the abstract is permitted for personal use only.
Citation

J. Hildenbrand ; A. Kürzinger ; E. Moretton ; A. Greiner ; A. Lambrecht, et al.
"Micromachined multicavity grey body emitter for the use in MIR spectroscopic systems", Proc. SPIE 6993, MEMS, MOEMS, and Micromachining III, 699304 (April 24, 2008); doi:10.1117/12.780859; http://dx.doi.org/10.1117/12.780859


Access This Proceeding
Sign in or Create a personal account to Buy this proceeding ($15 for members, $18 for non-members).

Figures

Tables

NOTE:
Citing articles are presented as examples only. In non-demo SCM6 implementation, integration with CrossRef’s "Cited By" API will populate this tab (http://www.crossref.org/citedby.html).

Some tools below are only available to our subscribers or users with an online account.

Related Content

Customize your page view by dragging & repositioning the boxes below.

Related Book Chapters

Topic Collections

Advertisement
  • Don't have an account?
  • Subscribe to the SPIE Digital Library
  • Create a FREE account to sign up for Digital Library content alerts and gain access to institutional subscriptions remotely.
Access This Proceeding
Sign in or Create a personal account to Buy this proceeding ($15 for members, $18 for non-members).
Access This Proceeding
Sign in or Create a personal account to Buy this article ($15 for members, $18 for non-members).
Access This Chapter

Access to SPIE eBooks is limited to subscribing institutions and is not available as part of a personal subscription. Print or electronic versions of individual SPIE books may be purchased via SPIE.org.