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Proceedings Article

Terahertz imaging with Si MOSFET focal-plane arrays

[+] Author Affiliations
A. Lisauskas, D. Glaab, H. G. Roskos

Johann Wolfgang Goethe-Univ. Frankfurt am Main (Germany)

E. Oejefors, U. R. Pfeiffer

Univ. of Wuppertal (Germany)

Proc. SPIE 7215, Terahertz Technology and Applications II, 72150J (February 12, 2009); doi:10.1117/12.809552
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From Conference Volume 7215

  • Terahertz Technology and Applications II
  • Kurt J. Linden; Laurence P. Sadwick; Créidhe M. O'Sullivan
  • San Jose, CA | January 24, 2009


We report on imaging at terahertz frequencies using a 3x5 Si MOSFET focal-plane array (FPA) processed by a 0.25-μm CMOS technology. Each pixel of the FPA consists of a 645-GHz patch antenna coupled to a FET detector and a 43-dB voltage amplifier with a 1.6-MHz bandwidth. We achieve a typical single-pixel responsivity of 80 kV/W and a noise-equivalent power (NEP) of 300 pW/√Hz at 30-kHz. The performance data of these all-CMOS devices pave the way for the realization of broad-band THz detectors and FPAs for video-rate active imaging on the basis of established low-cost and integration-friendly CMOS technology.

© (2009) COPYRIGHT SPIE--The International Society for Optical Engineering. Downloading of the abstract is permitted for personal use only.

A. Lisauskas ; D. Glaab ; H. G. Roskos ; E. Oejefors and U. R. Pfeiffer
"Terahertz imaging with Si MOSFET focal-plane arrays", Proc. SPIE 7215, Terahertz Technology and Applications II, 72150J (February 12, 2009); doi:10.1117/12.809552; http://dx.doi.org/10.1117/12.809552

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