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Proceedings Article

Reflectance and fluorescence imaging with a MEMS dual-axes confocal microscope

[+] Author Affiliations
Hyejun Ra, Yoshihiro Taguchi, Olav Solgaard

Stanford Univ.

Wibool Piyawattanametha

Stanford Univ. and National Electronics and Computer Technology Ctr. (Thailand)

Proc. SPIE 6466, MOEMS and Miniaturized Systems VI, 64660G (January 22, 2007); doi:10.1117/12.711560
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From Conference Volume 6466

  • MOEMS and Miniaturized Systems VI
  • David L. Dickensheets; Bishnu P. Gogoi; Harald Schenk
  • San Jose, California, United States | January 20, 2007

abstract

This paper presents a dual-axes confocal microscope based on a two-dimensional (2-D) MicroElectroMechanical system (MEMS) scanner. Dual-axes confocal microscopy provides high resolution in both transverse and axial directions, and is also well-suited for miniaturization and integration into endoscopes for in vivo imaging. The gimbaled MEMS scanner is fabricated on a double silicon-on-insulator (SOI) wafer (a silicon wafer bonded on a SOI wafer) and is actuated by self-aligned, vertical, electrostatic combdrives. The reflecting surface of the scanner is covered with a 10-nm aluminum layer. Reflectance and fluorescence imaging is successfully demonstrated in a breadboard setup. Images with a maximum field of view (FOV) of 340 μm x 420 μm are achieved at 8 frames per second. The transverse resolution is 3.9 μm and 6.7 μm for the horizontal and vertical dimensions, respectively.

© (2007) COPYRIGHT SPIE--The International Society for Optical Engineering. Downloading of the abstract is permitted for personal use only.
Citation

Hyejun Ra ; Wibool Piyawattanametha ; Yoshihiro Taguchi and Olav Solgaard
"Reflectance and fluorescence imaging with a MEMS dual-axes confocal microscope", Proc. SPIE 6466, MOEMS and Miniaturized Systems VI, 64660G (January 22, 2007); doi:10.1117/12.711560; http://dx.doi.org/10.1117/12.711560


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