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Proceedings Article

Tunable infrared detector with integrated micromachined Fabry-Perot filter

[+] Author Affiliations
Norbert Neumann, Martin Ebermann

InfraTec GmbH (Germany)

Karla Hiller

Chemnitz Univ. of Technology (Germany)

Steffen Kurth

Fraunhofer Institute for Reliability and Microintegration (Germany)

Proc. SPIE 6466, MOEMS and Miniaturized Systems VI, 646606 (January 22, 2007); doi:10.1117/12.698871
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From Conference Volume 6466

  • MOEMS and Miniaturized Systems VI
  • David L. Dickensheets; Bishnu P. Gogoi; Harald Schenk
  • San Jose, California, United States | January 20, 2007

abstract

This paper reports design, fabrication and test results of a tunable pyroelectric detector with an integrated micromachined Fabry-Perot (FP) filter for gas analysis in the Mid-Wave Infrared (MWIR). The new approach is based on a bulk micromachined Fabry-Perot interferometer with an air cavity, which is electrostatically tuned. Various types of moveable reflectors and spring configurations have been fabricated to determine the optimum solution with respect to maximum tuning range, low gravity influence on center wavelength and suitable filter bandwidth. Short and long cavity filters were designed for the spectral ranges of 3...4.3 μm and 3.7...5.0 μm respectively. The tunable filter is arranged on top of a current mode pyroelectric detector with a flat spectral response. It could be shown that the main challenge is to achieve a high finesse in spite of non-perfect parallelism, mirror curvature and additional phase shift caused by the Bragg reflectors.

© (2007) COPYRIGHT SPIE--The International Society for Optical Engineering. Downloading of the abstract is permitted for personal use only.
Citation

Norbert Neumann ; Martin Ebermann ; Karla Hiller and Steffen Kurth
"Tunable infrared detector with integrated micromachined Fabry-Perot filter", Proc. SPIE 6466, MOEMS and Miniaturized Systems VI, 646606 (January 22, 2007); doi:10.1117/12.698871; http://dx.doi.org/10.1117/12.698871


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