Design of optical coherence tomography probe using a 2-axis MEMS scanning mirror

Daija Wang; Guohua Shi; Zhang Li; Dongmei Cai; Jun Yao; Tianquan Fan

doi:10.1117/12.832093

18 May 2009 Design of optical coherence tomography probe using a 2-axis MEMS scanning mirror

Daija Wang, Guohua Shi, Zhang Li, Dongmei Cai, Jun Yao, Tianquan Fan

Proceedings Volume 7284, 4th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Design, Manufacturing, and Testing of Micro- and Nano-Optical Devices and Systems; 72840Y (2009) https://doi.org/10.1117/12.832093
Event: AOMATT 2008 - 4th International Symposium on Advanced Optical Manufacturing, 2008, Chengdu, Chengdu, China

Abstract

We design a dual axis rotary mirror based on microelectromechanical system technology used for the endoscopic optical coherence tomography (OCT) application. With the inherent advantages of the micromachined device such as small size, low consumption and high reliability, it allows the miniaturization of conventional bulky OCT probe. The dimension of the micro-mirror is 140um×270um. Through use of finite element method, the simulation results show that the scanning mirror is capable of high frequency out-of-plane rotation in two mutually independent axes. The natural frequencies of the first two modes, corresponding to tip and tilt modes, are 65.74 KHz and 65.75 KHz respectively. The MEMS scanning mirror is electrostatically actuated with the supply voltage ranging from 30v to 40v. Via 2-axis scanning, a three-dimensional image of biological tissue can be acquired when the MEMS mirror is integrated with the OCT probe system. The entire MEMS scanner can be fabricated using the proposed surface-micromachining process, capable of mass production.

Citation Download Citation

Daija Wang, Guohua Shi, Zhang Li, Dongmei Cai, Jun Yao, and Tianquan Fan "Design of optical coherence tomography probe using a 2-axis MEMS scanning mirror", Proc. SPIE 7284, 4th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Design, Manufacturing, and Testing of Micro- and Nano-Optical Devices and Systems, 72840Y (18 May 2009); https://doi.org/10.1117/12.832093

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