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Proceedings Article

Multi-phase-level diffractive elements realized by binary effective medium patterns

[+] Author Affiliations
Wiebke Freese, Thomas Kämpfe, Ernst-Bernhard Kley, Andreas Tünnermann

Friedrich-Schiller-Univ. Jena (Germany)

Proc. SPIE 7591, Advanced Fabrication Technologies for Micro/Nano Optics and Photonics III, 75910Z (February 16, 2010); doi:10.1117/12.843526
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From Conference Volume 7591

  • Advanced Fabrication Technologies for Micro/Nano Optics and Photonics III
  • Winston V. Schoenfeld; Jian J. Wang; Marko Loncar; Thomas J. Suleski
  • San Francisco, California | January 23, 2010

abstract

Subwavelength structures open up the possibility to create an artificial index material which enables the realization of high-efficient diffractive structures. This can be used to generate optical elements with nearly arbitrary phase profiles. We demonstrate the realization of computer-generated holograms based on this effective medium approach. High diffraction efficiencies can be realized by multi-phase-level modulation based on two-dimensional binary nanostructures. The fabrication is performed by one lithographical step using a high-speed e-beam writer which allows high-resolution patterning even on large areas. A diffractive element in the visible range is experimentally demonstrated using the presented effective index approach.

© (2010) COPYRIGHT SPIE--The International Society for Optical Engineering. Downloading of the abstract is permitted for personal use only.
Citation

Wiebke Freese ; Thomas Kämpfe ; Ernst-Bernhard Kley and Andreas Tünnermann
"Multi-phase-level diffractive elements realized by binary effective medium patterns", Proc. SPIE 7591, Advanced Fabrication Technologies for Micro/Nano Optics and Photonics III, 75910Z (February 16, 2010); doi:10.1117/12.843526; http://dx.doi.org/10.1117/12.843526


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