Remotely accessible laboratory for MEMS testing

Ganapathy Sivakumar; Matthew Mulsow; Aaron Melinger; Shelby Lacouture; Tim E. Dallas

doi:10.1117/12.842465

4 February 2010 Remotely accessible laboratory for MEMS testing

Ganapathy Sivakumar, Matthew Mulsow, Aaron Melinger, Shelby Lacouture, Tim E. Dallas

Proceedings Volume 7592, Reliability, Packaging, Testing, and Characterization of MEMS/MOEMS and Nanodevices IX; 75920K (2010) https://doi.org/10.1117/12.842465
Event: SPIE MOEMS-MEMS, 2010, San Francisco, California, United States

Abstract

We report on the construction of a remotely accessible and interactive laboratory for testing microdevices (aka: MicroElectroMechancial Systems - MEMS). Enabling expanded utilization of microdevices for research, commercial, and educational purposes is very important for driving the creation of future MEMS devices and applications. Unfortunately, the relatively high costs associated with MEMS devices and testing infrastructure makes widespread access to the world of MEMS difficult. The creation of a virtual lab to control and actuate MEMS devices over the internet helps spread knowledge to a larger audience. A host laboratory has been established that contains a digital microscope, microdevices, controllers, and computers that can be logged into through the internet. The overall layout of the tele-operated MEMS laboratory system can be divided into two major parts: the server side and the client side. The server-side is present at Texas Tech University, and hosts a server machine that runs the Linux operating system and is used for interfacing the MEMS lab with the outside world via internet. The controls from the clients are transferred to the lab side through the server interface. The server interacts with the electronics required to drive the MEMS devices using a range of National Instruments hardware and LabView Virtual Instruments. An optical microscope (100 ×) with a CCD video camera is used to capture images of the operating MEMS. The server broadcasts the live video stream over the internet to the clients through the website. When the button is pressed on the website, the MEMS device responds and the video stream shows the movement in close to real time.

Citation Download Citation

Ganapathy Sivakumar, Matthew Mulsow, Aaron Melinger, Shelby Lacouture, and Tim E. Dallas "Remotely accessible laboratory for MEMS testing", Proc. SPIE 7592, Reliability, Packaging, Testing, and Characterization of MEMS/MOEMS and Nanodevices IX, 75920K (4 February 2010); https://doi.org/10.1117/12.842465

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