High-performance uncooled amorphous silicon TEC less XGA IRFPA with 17&#956;m pixel-pitch

C. Trouilleau; B. Fièque; S. Noblet; F. Giner; D. Pochic; A. Durand; P. Robert; S. Cortial; M. Vilain; J. L. Tissot; J. J. Yon

doi:10.1117/12.819993

6 May 2009 High-performance uncooled amorphous silicon TEC less XGA IRFPA with 17μm pixel-pitch

C. Trouilleau, B. Fièque, S. Noblet, F. Giner, D. Pochic, A. Durand, P. Robert, S. Cortial, M. Vilain, J. L. Tissot, J. J. Yon

Author Affiliations +

Proceedings Volume 7298, Infrared Technology and Applications XXXV; 72980Q (2009) https://doi.org/10.1117/12.819993
Event: SPIE Defense, Security, and Sensing, 2009, Orlando, Florida, United States

Abstract

The high level of accumulated expertise by ULIS and CEA/LETI on uncooled microbolometers made from amorphous silicon enables ULIS to develop 1024 x 768 (XGA) IRFPA formats with 17μm pixel-pitch to address high end, high performance applications. This detector has kept all the innovations developed on the full TV format readout integrated circuit (ROIC): detector configuration by serial link, two video outputs, low power consumption, wide electrical dynamic range... The specific appeal of this unit lies in the high image resolution it provides. The reduction of the pixel-pitch turns this XGA array into a product well adapted for high resolution yet compact systems. In the last part of the paper, we will look more closely at the high electro-optical performances of this IRFPA and the rapid performance enhancement. We will insist on NETD coupled with wide thermal dynamic range, as well as the outstanding uniformity and high pixel operability, achieved thanks to the mastering of the amorphous silicon technology coupled with the ROIC design. This technology node paves the way to high end VGA or 1/4VGA sensors as well as large diffusion compact smaller formats like 160 x 120 or smaller.

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C. Trouilleau, B. Fièque, S. Noblet, F. Giner, D. Pochic, A. Durand, P. Robert, S. Cortial, M. Vilain, J. L. Tissot, and J. J. Yon "High-performance uncooled amorphous silicon TEC less XGA IRFPA with 17μm pixel-pitch", Proc. SPIE 7298, Infrared Technology and Applications XXXV, 72980Q (6 May 2009); https://doi.org/10.1117/12.819993

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