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Proceedings Article

High-speed liquid lens with 2-ms response and 80.3-nm root-mean-square wavefront error

[+] Author Affiliations
Hiromasa Oku, Masatoshi Ishikawa

The Univ. of Tokyo (Japan)

Proc. SPIE 7594, MOEMS and Miniaturized Systems IX, 759407 (February 16, 2010); doi:10.1117/12.840855
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From Conference Volume 7594

  • MOEMS and Miniaturized Systems IX
  • Harald Schenk; Wibool Piyawattanametha
  • San Francisco, California | January 23, 2010

abstract

A liquid lens structure with a step response time of 2 ms, a refractive power range of 52 D, and a root-meansquare (RMS) wavefront error of 80.3 nm is reported. This lens uses a liquid-liquid interface with a pinned contact line as a variable refractive surface, and its shape is controlled by a piezo stack actuator via a built-in hydraulic amplifier. The potential applications of this device include axial focus scanning of microscopes and focusing/zooming of camera lenses and machine vision systems.

© (2010) COPYRIGHT SPIE--The International Society for Optical Engineering. Downloading of the abstract is permitted for personal use only.
Citation

Hiromasa Oku and Masatoshi Ishikawa
"High-speed liquid lens with 2-ms response and 80.3-nm root-mean-square wavefront error", Proc. SPIE 7594, MOEMS and Miniaturized Systems IX, 759407 (February 16, 2010); doi:10.1117/12.840855; http://dx.doi.org/10.1117/12.840855


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