Formation of silicides in annealed periodic multilayers

H. Maury; P. Jonnard; K. Le Guen; J.-M. André

doi:10.1117/12.820915

30 April 2009 Formation of silicides in annealed periodic multilayers

H. Maury, P. Jonnard, K. Le Guen, J.-M. André

Proceedings Volume 7360, EUV and X-Ray Optics: Synergy between Laboratory and Space; 73600P (2009) https://doi.org/10.1117/12.820915
Event: SPIE Optics + Optoelectronics, 2009, Prague, Czech Republic

Abstract

Periodic multilayers of nanometric period are widely used as optical components for the X-ray and extreme UV (EUV) ranges, in X-ray space telescopes, X-ray microscopes, EUV photolithography or synchrotron beamlines for example. Their optical performances depend on the quality of the interfaces between the various layers: chemical interdiffusion or mechanical roughness shifts the application wavelength and can drastically decrease the reflectance. Since under high thermal charge interdiffusion is known to get enhanced, the study of the thermal stability of such structures is essential to understand how interfacial compounds develop. We have characterized X-ray and EUV siliconcontaining multilayers (Mo/Si, Sc/Si and Mg/SiC) as a function of the annealing temperature (up to 600°C) using two non-destructive methods. X-ray emission from the silicon atoms, describing the Si valence states, is used to determine the chemical nature of the compounds present in the interphases while X-ray reflectivity in the hard and soft X-ray ranges can be related to the optical properties. In the three cases, interfacial metallic (Mo, Sc, Mg) silicides are evidenced and the thickness of the interphase increases with the annealing temperature. For Mo/Si and Sc/Si multilayers, silicides are even present in the as-prepared multilayers. Characteristic parameters of the stacks are determined: composition of the interphases, thickness and roughness of the layers and interphases if any. Finally, we have evidenced the maximum temperature of application of these multilayers to minimize interdiffusion.

Citation Download Citation

H. Maury, P. Jonnard, K. Le Guen, and J.-M. André "Formation of silicides in annealed periodic multilayers", Proc. SPIE 7360, EUV and X-Ray Optics: Synergy between Laboratory and Space, 73600P (30 April 2009); https://doi.org/10.1117/12.820915

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