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Proceedings Article

Morphology, microstructure, stress and damage properties of thin film coatings for the LCLS x-ray mirrors

[+] Author Affiliations
Regina Soufli, Sherry L. Baker, Jeff C. Robinson, Tom J. McCarville, Michael J. Pivovaroff, Stefan P. Hau-Riege, Richard Bionta

Lawrence Livermore National Lab. (USA)

Eric M. Gullikson

Lawrence Berkeley National Lab. (USA)

Peter Stefan

SLAC National Accelerator Lab. (USA)

Proc. SPIE 7361, Damage to VUV, EUV, and X-Ray Optics II, 73610U (May 18, 2009); doi:10.1117/12.823836
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From Conference Volume 7361

  • Damage to VUV, EUV, and X-Ray Optics II
  • Libor Juha; Saša Bajt; Ryszard Sobierajski
  • Prague, Czech Republic | April 20, 2009

abstract

The development and properties of reflective coatings for the x-ray offset mirror systems of the Linac Coherent Light Source (LCLS) free-electron laser (FEL) are discussed in this manuscript. The uniquely high instantaneous dose of the LCLS FEL beam translates to strict limits in terms of materials choice, thus leading to an x-ray mirror design consisting of a reflective coating deposited on a silicon substrate. Coherent wavefront preservation requirements for these mirrors result in stringent surface figure and finish specifications. DC-magnetron sputtered B4C and SiC thin film coatings with optimized stress, roughness and figure properties for the LCLS x-ray mirrors are presented. The evolution of microstructure, morphology, and stress of these thin films versus deposition conditions is discussed. Experimental results on the performance of these coatings with respect to FEL damage are also presented.

© (2009) COPYRIGHT SPIE--The International Society for Optical Engineering. Downloading of the abstract is permitted for personal use only.
Citation

Regina Soufli ; Sherry L. Baker ; Jeff C. Robinson ; Eric M. Gullikson ; Tom J. McCarville, et al.
"Morphology, microstructure, stress and damage properties of thin film coatings for the LCLS x-ray mirrors", Proc. SPIE 7361, Damage to VUV, EUV, and X-Ray Optics II, 73610U (May 18, 2009); doi:10.1117/12.823836; http://dx.doi.org/10.1117/12.823836


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