A readout integrated circuit (ROIC) for uncooled microcantilever infrared focal plane arrays (IRFPAs) based on capacitive readout is proposed. The ROIC is optimized according to noise modeling and analysis to reduce noise. An experimental chip of 16×16 FPAs readout circuit has been designed and fabricated using 0.35um CMOS technology. The measurement results showed that the power dissipation is 16.5mW from a 5V supply voltage at 50Hz frame rate, the linearity is 99.2% at the typical mode; the uniformity is larger than 97% and the equivalent noise charge (ENC) is below 150e. It is believed that the ROIC has a great potential in the applications of large-scale micro-cantilever-based uncooled IRFPAs.© (2009) COPYRIGHT SPIE--The International Society for Optical Engineering. Downloading of the abstract is permitted for personal use only.