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Proceedings Article

Sensing of waviness of glossy and rough surface by DOE sensor

[+] Author Affiliations
Raimo Silvennoinen

Univ. of Joensuu (Finland)

Proc. SPIE 7388, Ninth International Conference on Correlation Optics, 73880N (December 31, 2009); doi:10.1117/12.848929
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From Conference Volume 7388

  • Ninth International Conference on Correlation Optics
  • Chernivtsi, Ukraine | September 20, 2009

abstract

Theory to sense waviness of glossy surfaces with different roughness utilizing diffractive optical element (DOE) based sensor is introduced, and experimentally verified. The verifications are performed from commercially available surface roughness standards including reamed, turned, vertically and horizontally milled surfaces with different surface roughness up 6.3μm.

© (2009) COPYRIGHT SPIE--The International Society for Optical Engineering. Downloading of the abstract is permitted for personal use only.
Citation

Raimo Silvennoinen
"Sensing of waviness of glossy and rough surface by DOE sensor", Proc. SPIE 7388, Ninth International Conference on Correlation Optics, 73880N (December 31, 2009); doi:10.1117/12.848929; http://dx.doi.org/10.1117/12.848929


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