Combining rigorous diffraction calculation and GPU accelerated nonsequential raytracing for high precision simulation of a linear grating spectrometer

Florian Mauch; David Fleischle; Wolfram Lyda; Wolfgang Osten; Torsten Krug; Reto Häring

doi:10.1117/12.889175

23 May 2011 Combining rigorous diffraction calculation and GPU accelerated nonsequential raytracing for high precision simulation of a linear grating spectrometer

Florian Mauch, David Fleischle, Wolfram Lyda, Wolfgang Osten, Torsten Krug, Reto Häring

Author Affiliations +

Proceedings Volume 8083, Modeling Aspects in Optical Metrology III; 80830F (2011) https://doi.org/10.1117/12.889175
Event: SPIE Optical Metrology, 2011, Munich, Germany

Abstract

Simulation of grating spectrometers constitutes the problem of propagating a spectrally broad light field through a macroscopic optical system that contains a nanostructured grating surface. The interest of the simulation is to quantify and optimize the stray light behaviour, which is the limiting factor in modern high end spectrometers. In order to accomplish this we present a simulation scheme that combines a RCWA (rigorous coupled wave analysis) simulation of the grating surface with a selfmade GPU (graphics processor unit) accelerated nonsequential raytracer. Using this, we are able to represent the broad spectrum of the light field as a superposition of many monochromatic raysets and handle the huge raynumber in reasonable time.

Citation Download Citation

Florian Mauch, David Fleischle, Wolfram Lyda, Wolfgang Osten, Torsten Krug, and Reto Häring "Combining rigorous diffraction calculation and GPU accelerated nonsequential raytracing for high precision simulation of a linear grating spectrometer", Proc. SPIE 8083, Modeling Aspects in Optical Metrology III, 80830F (23 May 2011); https://doi.org/10.1117/12.889175

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