Si integrated pyroelectric sensor array using epitaxial gamma-Al2O3/Si substrates and epitaxial PZT thin films

Daisuke Akai; Naoki Kawazu; Takahiro Sugai; Kazuaki Sawada; Makoto Ishida

doi:10.1117/12.824370

20 August 2009 Si integrated pyroelectric sensor array using epitaxial γ-Al₂O₃/Si substrates and epitaxial PZT thin films

Daisuke Akai, Naoki Kawazu, Takahiro Sugai, Kazuaki Sawada, Makoto Ishida

Author Affiliations +

Proceedings Volume 7419, Infrared Systems and Photoelectronic Technology IV; 741905 (2009) https://doi.org/10.1117/12.824370
Event: SPIE Photonic Devices + Applications, 2009, San Diego, California, United States

Abstract

In this paper, we report that integrated pyroelectric infrared(IR) sensor array using surface micromachine technique with nMOS/nJFET devices on epitaxial γ-Al₂O₃/Si substrates has been successfully fabricated. Orientation and crystallinity control of pyroelectric and ferroelectric films are important to archive high sensitivity pyroelectric IR detector. We propose epitaxial γ-Al₂O₃ thin films as buffer layer on Si substrates to control them. Each pixel of fabricated IR sensor array has a thermally isolated Au/PZT(001)/Pt(001)/γ-Al₂O₃ stacked membrane detector, a low noise nJFET source follower and a switching nMOSFET. A voltage sensitivity of a fabricated detector is increased by forming thermal isolated structure. The fabricated sensor operated under a chopping frequency of 100 Hz. The R_V, NEP and D* at 30 Hz are 1703 V/W, 7.22 × 10^-11 WHz^-1/2 and 1.38 × 108 cmHz1/2W^-1, respectively. This sensor will have potential for Si integrated pyroelectric IR imager.

Citation Download Citation

Daisuke Akai, Naoki Kawazu, Takahiro Sugai, Kazuaki Sawada, and Makoto Ishida "Si integrated pyroelectric sensor array using epitaxial γ-Al₂O₃/Si substrates and epitaxial PZT thin films", Proc. SPIE 7419, Infrared Systems and Photoelectronic Technology IV, 741905 (20 August 2009); https://doi.org/10.1117/12.824370

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available