Study on method of data standardization in interferometric testing

Wei Chen

doi:10.1117/12.863912

11 October 2010 Study on method of data standardization in interferometric testing

Wei Chen

Proceedings Volume 7656, 5th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Optical Test and Measurement Technology and Equipment; 76562I (2010) https://doi.org/10.1117/12.863912
Event: 5th International Symposium on Advanced Optical Manufacturing and Testing Technologies, 2010, Dalian, China

Abstract

As a rule, Interferometers are used to test the figure in the polishing phase of optical component, it could provide advance tutor suggestion for manufacturing. It is unable to get the whole wave-front interferogram usually because phase-shift Interferometry is sensitive to environment vibration, so the exactly interference data of the optical surface could not be obtained. Various spatial point on the tested optical component will be given by calculation method about arithmetic average value of equal accuracy is provied. This paper describes the testing results of optical components in size Φ1200mm, it is proved the method could eliminate the vibration effectively and get the standardization data.

Citation Download Citation

Wei Chen "Study on method of data standardization in interferometric testing", Proc. SPIE 7656, 5th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Optical Test and Measurement Technology and Equipment, 76562I (11 October 2010); https://doi.org/10.1117/12.863912

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