Optimization of scandia thin films for high power laser coating applications

Erik M. Krous; Dinesh Patel; Ashot Markosyan; Duy N. Nguyen; Luke A. Emmert; Peter Langston; Roger Route; Martin Fejer; Wolfgang Rudolph; Michelle Shinn; Carmen S. Menoni

doi:10.1117/12.836915

31 December 2009 Optimization of scandia thin films for high power laser coating applications

Erik M. Krous, Dinesh Patel, Ashot Markosyan, Duy N. Nguyen, Luke A. Emmert, Peter Langston, Roger Route, Martin Fejer, Wolfgang Rudolph, Michelle Shinn, Carmen S. Menoni

Author Affiliations +

Proceedings Volume 7504, Laser-Induced Damage in Optical Materials: 2009; 750407 (2009) https://doi.org/10.1117/12.836915
Event: Laser Damage Symposium XLI: Annual Symposium on Optical Materials for High Power Lasers, 2009, Boulder, Colorado, United States

Abstract

We discuss the physical and optical properties of Sc₂O₃ single layers deposited by the dual ion beam sputtering technique at oxygen partial pressures ranging from 1.7×10^-5 to 5.1×10^-5 Torr. The films are amorphous with crystallite size ~10 nm and have surface roughness RMS values of 1.2±0.3 nm. The refractive index at 1 μm is 1.95. Absorption loss is shown to be sensitive to the oxygen partial pressure during growth. Multiple-pulse damage experiments suggest that the scandia film deposited at the higher oxygen partial pressure accumulates laser-induced trap defects more slowly than the scandia film deposited in a lower oxygen partial pressure atmosphere.

Citation Download Citation

Erik M. Krous, Dinesh Patel, Ashot Markosyan, Duy N. Nguyen, Luke A. Emmert, Peter Langston, Roger Route, Martin Fejer, Wolfgang Rudolph, Michelle Shinn, and Carmen S. Menoni "Optimization of scandia thin films for high power laser coating applications", Proc. SPIE 7504, Laser-Induced Damage in Optical Materials: 2009, 750407 (31 December 2009); https://doi.org/10.1117/12.836915

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available