Performance enhancement of µ-bolometer by increasing fill factor

Seung-Man Park; Seungoh Han; Chang Hwan Chun; Chang Suk Han

doi:10.1117/12.852752

3 May 2010 Performance enhancement of μ-bolometer by increasing fill factor

Seung-Man Park, Seungoh Han, Chang Hwan Chun, Chang Suk Han

Proceedings Volume 7660, Infrared Technology and Applications XXXVI; 766013 (2010) https://doi.org/10.1117/12.852752
Event: SPIE Defense, Security, and Sensing, 2010, Orlando, Florida, United States

Abstract

In this paper, the performance enhancing method by increasing optical fill factor of a μ-bolometer is proposed. The main idea of increasing optical fill factor of a μ-bolometer is the reducing the leg area without deteriorating the thermal and electrical properties of its legs. We propose 'the self align leg' structure in order to reduce the leg area without deteriorating electrical and thermal properties. From the analysis, this method can give some benefits, the improvement of responsivity up to 9% and noise equivalent temperature difference 13% through fill factor increasing by 5 to 7%. A new plausible method of increasing fill factor can easily be incorporated with a conventional process without considerable change of process.

Citation Download Citation

Seung-Man Park, Seungoh Han, Chang Hwan Chun, and Chang Suk Han "Performance enhancement of μ-bolometer by increasing fill factor", Proc. SPIE 7660, Infrared Technology and Applications XXXVI, 766013 (3 May 2010); https://doi.org/10.1117/12.852752

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