Excimer mirror thin film laser damage competition

Christopher J. Stolz; Holger Blaschke; Lars Jensen; Heinrich Mädebach; Detlev Ristau

doi:10.1117/12.899187

6 December 2011 Excimer mirror thin film laser damage competition

Christopher J. Stolz, Holger Blaschke, Lars Jensen, Heinrich Mädebach, Detlev Ristau

Proceedings Volume 8190, Laser-Induced Damage in Optical Materials: 2011; 819007 (2011) https://doi.org/10.1117/12.899187
Event: SPIE Laser Damage, 2011, Boulder, Colorado, United States

Abstract

Excimer lasers are a critical technology for the $400 billion annual market of manufactured integrated circuits. Other uses of excimer lasers include medical applications such as laser eye surgery and micro-machining industrial applications. Ultraviolet laser mirrors are used for beam steering, therefore high reliability is desired for such commercial industrial applications. A laser damage competition of excimer mirror coatings creates the opportunity to survey private industry, governmental institutions, and university labs allowing a direct laser resistance comparison of samples tested under identical conditions. The major requirement of the submitted coatings was a minimum reflectance of 97% at 193 nm at normal incidence. The choice of coating materials, design, and deposition method were left to the participant. Damage testing was performed with a 193 nm excimer laser at a pulse length of 13 ns. A double blind test assured sample and submitter anonymity so only a summary of the deposition process, coating materials, layer count and spectral results are presented. In summary, a 70× difference was seen in the twelve submitted mirror samples, with the highest laser resistant sample being deposited by resistive heating and composed of three materials (LaF3, AlF3, & MgF2). Laser resistance was strongly affected by substrate cleaning, coating deposition method, and coating material selection whereas layer count had a minimal impact.

Citation Download Citation

Christopher J. Stolz, Holger Blaschke, Lars Jensen, Heinrich Mädebach, and Detlev Ristau "Excimer mirror thin film laser damage competition", Proc. SPIE 8190, Laser-Induced Damage in Optical Materials: 2011, 819007 (6 December 2011); https://doi.org/10.1117/12.899187

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