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Proceedings Article

Thermal and optical properties of sol-gel and SU-8 resists

[+] Author Affiliations
Toshiyuki Suzuki

Perkin Elmer Japan Co., Ltd. (Japan)

Junko Morikawa, Toshimasa Hashimoto

Tokyo Institute of Technology (Japan)

Ričardas Buividas, Gediminas Gervinskas

Swinburne Univ. of Technology (Australia)

Domas Paipulas, Mangirdas Malinauskas

Vilnius Univ. (Lithuania)

Vygantas Mizeikis

Shizuoka Univ. (Japan)

Saulius Juodkazis

Swinburne Univ. of Technology (Australia) and Melbourne Ctr. for Nanofabrication (Australia)

Proc. SPIE 8249, Advanced Fabrication Technologies for Micro/Nano Optics and Photonics V, 82490K (February 9, 2012); doi:10.1117/12.907028
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From Conference Volume 8249

  • Advanced Fabrication Technologies for Micro/Nano Optics and Photonics V
  • Winston V. Schoenfeld; Raymond C. Rumpf; Georg von Freymann
  • San Francisco, California, USA | January 21, 2012

abstract

We report on a combined differential scanning calorimetric (DSC) and Raman scattering study of thermal polymerization of sol-gel organic-inorganic SZ2080 and SU-8 resists. In SZ2080, endothermic peak at 95°C signify drying of the resist and justifies the required pre-bake at around 100°C for 1-2 h for the best performance during femtosecond (fs-)direct laser writing. A strong exothermic peak at 140°C (under 2 K/min heating rate) completes polymerization of the resist. It is revealed that 1wt% of photoinitiators change Raman scattering intensity of SZ2080 and can contribute efficiently to heating and cross-linking of photo-polymers. In the case of SU-8, a 65°C DSC feature related to solvent evaporation was observed. The strongest changes in Raman spectrum occurs at a narrow 895 cm-1 band which is linked to polymerization. Raman scattering taken during DSC revealed spectral changes following the polymerization; an applicability of this method for monitoring photopolymerization induced by ultra-fast laser sources and feasibility of a laser-modulated calorimetry is discussed.

© (2012) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Citation

Toshiyuki Suzuki ; Junko Morikawa ; Toshimasa Hashimoto ; Ričardas Buividas ; Gediminas Gervinskas, et al.
"Thermal and optical properties of sol-gel and SU-8 resists", Proc. SPIE 8249, Advanced Fabrication Technologies for Micro/Nano Optics and Photonics V, 82490K (February 9, 2012); doi:10.1117/12.907028; http://dx.doi.org/10.1117/12.907028


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