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Proceedings Article

Shared shuttles for integrated silicon optoelectronics

[+] Author Affiliations
Tom Baehr-Jones, Ran Ding, Ali Ayazi, Thierry Pinguet, Matt Streshinsky, Nick Harris, Jing Li, Li He, Mike Gould, Yi Zhang, Michael Hochberg

Univ. of Washington (USA)

Andy Eu-Jin Lim, Tsung-Yang Liow, Selin Hwee-Gee Teo, Guo-Qiang Lo

A*STAR Institute of Microelectronics (Singapore)

Stewart Ocheltree, Craig Hill, Andrew Pomerene

BAE Systems (USA)

Peter De Dobbelaere, Attila Mekis

Luxtera (USA)

Proc. SPIE 8252, MOEMS and Miniaturized Systems XI, 82520G (February 9, 2012); doi:10.1117/12.913096
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From Conference Volume 8252

  • MOEMS and Miniaturized Systems XI
  • Harald Schenk; Wibool Piyawattanametha; Wilfried Noell
  • San Francisco, California, USA | January 21, 2012


Shared shuttle runs are an important factor of the microelectronics business ecosystem, allowing fabless semiconductor companies to access advanced processes and supporting the development of new tools and processes. We report on the creation and progress of a shared shuttle program for access to advanced silicon photonics optoelectronic platforms that we expect will create a similar environment for the field of integrated photonics.

© (2012) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.

Tom Baehr-Jones ; Ran Ding ; Ali Ayazi ; Thierry Pinguet ; Matt Streshinsky, et al.
"Shared shuttles for integrated silicon optoelectronics", Proc. SPIE 8252, MOEMS and Miniaturized Systems XI, 82520G (February 9, 2012); doi:10.1117/12.913096; http://dx.doi.org/10.1117/12.913096

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