Deformable mirror with controlled air damping for fast focus tracking and scanning

Mohammad J. Moghimi; Krishna Chattergoon; Chris Wilson; David L. Dickensheets

doi:10.1117/12.910977

15 February 2012 Deformable mirror with controlled air damping for fast focus tracking and scanning

Mohammad J. Moghimi, Krishna Chattergoon, Chris Wilson, David L. Dickensheets

Proceedings Volume 8252, MOEMS and Miniaturized Systems XI; 82520M (2012) https://doi.org/10.1117/12.910977
Event: SPIE MOEMS-MEMS, 2012, San Francisco, California, United States

Abstract

Air flow is the dominant damping mechanism for deformable membrane mirrors that are actuated with electrostatic pressure from a counter electrode in close proximity to the flexible membrane. We use cryogenic deep silicon etching to create through-wafer perforations in the backplate in order to control air damping and achieve high-speed focus control. This paper describes both our design approach and device fabrication details. We show that damping can be controlled by selecting the proper hole pattern, and we present experimental and simulated frequency response measurements for small membrane displacements. Also we measured the 95% settling time of a 4 mm diameter mirror subjected to a 10 μm step deflection to be less than 200 μs.

Citation Download Citation

Mohammad J. Moghimi, Krishna Chattergoon, Chris Wilson, and David L. Dickensheets "Deformable mirror with controlled air damping for fast focus tracking and scanning", Proc. SPIE 8252, MOEMS and Miniaturized Systems XI, 82520M (15 February 2012); https://doi.org/10.1117/12.910977

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