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Proceedings Article

Thermo-mechanical properties of a deformable mirror with screen printed actuator

[+] Author Affiliations
C. Bruchmann, A. Tünnermann

Friedrich-Schiller-Univ. Jena (Germany) and Fraunhofer Institute for Applied Optics and Precision Engineering (Germany)

M. Appelfelder

Friedrich-Schiller-Univ. Jena (Germany)

E. Beckert, R. Eberhardt

Fraunhofer Institute for Applied Optics and Precision Engineering (Germany)

Proc. SPIE 8253, MEMS Adaptive Optics VI, 82530D (February 9, 2012); doi:10.1117/12.912614
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From Conference Volume 8253

  • MEMS Adaptive Optics VI
  • Scot S. Olivier; Thomas G. Bifano; Joel Kubby
  • San Francisco, California, USA | January 21, 2012

abstract

This paper reports on the thermo-mechanical modeling and characterization of a screen printed deformable mirror. The unimorph mirror offers a ceramic LTCC substrate with screen printed PZT layers on its rear surface and a machined copper layer on its front surface. We present the thermo-mechanical model of the deformable mirror based on Ansys multiphysics. The developed mirror design is practically characterized. The homogeneous loading of the optimized design results in a membrane deformation with a rate of -0.2 μm/K, while a laser loading causes a change with a rate of 1.3 μm/W. The proposed mirror design is also suitable to pre-compensate laser generated mirror deformations by homogeneous thermal loading (heating). We experimentally show that a 35 K pre-heating of the mirror assembly could compensate an absorbed laser power of 1.25 W.

© (2012) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Citation

C. Bruchmann ; M. Appelfelder ; E. Beckert ; R. Eberhardt and A. Tünnermann
"Thermo-mechanical properties of a deformable mirror with screen printed actuator", Proc. SPIE 8253, MEMS Adaptive Optics VI, 82530D (February 9, 2012); doi:10.1117/12.912614; http://dx.doi.org/10.1117/12.912614


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