Micro-optics on VCSELs using NIR photopolymers

V. Bardinal; B. Reig; T. Camps; D. Barat; E. Daran; J. B. Doucet; C. Turck; J. P. Malval; D. J. Lougnot; O. Soppera

doi:10.1117/12.853886

12 May 2010 Micro-optics on VCSELs using NIR photopolymers

V. Bardinal, B. Reig, T. Camps, D. Barat, E. Daran, J. B. Doucet, C. Turck, J. P. Malval, D. J. Lougnot, O. Soppera

Proceedings Volume 7716, Micro-Optics 2010; 771607 (2010) https://doi.org/10.1117/12.853886
Event: SPIE Photonics Europe, 2010, Brussels, Belgium

Abstract

Laser beam shaping is a key issue for the photonic integration of VCSEL sources. Most of the techniques proposed to integrate micro-optics elements onto VCSEL devices imply either a hybrid assembly or a photolithography step, whose precision limits the accuracy of lens alignment relatively to the VCSEL source. We present here a new method for self-fabrication of microtips on Vertical-Cavity Surface-Emitting Lasers (VCSELs) by means of Near Infra- Red (NIR) photo-polymerization. This approach is based on a single fabrication step, implementing novel photopolymers sensitive at the lasing wavelength. Consequently the process is triggered by the laser source itself and can be applied easily to VCSEL devices during their electro-optic characterization. The method we have developed for tips fabrication is detailed as well as corresponding optical properties. The applications of this new and simple method concern laser light focusing and collimation for integrated micro-systems, coupling to fibers for optical communications as well as novel micro-probes fabrication for near-field optical microscopy.

Citation Download Citation

V. Bardinal, B. Reig, T. Camps, D. Barat, E. Daran, J. B. Doucet, C. Turck, J. P. Malval, D. J. Lougnot, and O. Soppera "Micro-optics on VCSELs using NIR photopolymers", Proc. SPIE 7716, Micro-Optics 2010, 771607 (12 May 2010); https://doi.org/10.1117/12.853886

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