A CMOS imager using focal-plane pinhole effect for confocal multibeam scanning microscopy

Min-Woong Seo; An Wang; Zhuo Li; Keita Yasutomi; Keiichiro Kagawa; Shoji Kawahito

doi:10.1117/12.908285

15 February 2012 A CMOS imager using focal-plane pinhole effect for confocal multibeam scanning microscopy

Min-Woong Seo, An Wang, Zhuo Li, Keita Yasutomi, Keiichiro Kagawa, Shoji Kawahito

Proceedings Volume 8298, Sensors, Cameras, and Systems for Industrial and Scientific Applications XIII; 829807 (2012) https://doi.org/10.1117/12.908285
Event: IS&T/SPIE Electronic Imaging, 2012, Burlingame, California, United States

Abstract

A CMOS imager for confocal multi-beam scanning microscopy, where the pixel itself works as a pinhole, is proposed. This CMOS imager is suitable for building compact, low-power, and confocal microscopes because the complex Nipkow disk with a precisely aligned pinhole array can be omitted. The CMOS imager is composed of an array of sub-imagers, and can detect multiple beams at the same time. To achieve a focal-plane pinhole effect, only one pixel in each subimager, which is at the conjugate position of a light spot, accumulates the photocurrent, and the other pixels are unread. This operation is achieved by 2-dimensional vertical and horizontal shift registers. The proposed CMOS imager for the confocal multi-beam scanning microscope system was fabricated in 0.18-μm standard CMOS technology with a pinned photodiode option. The total area of the chip is 5.0mm × 5.0mm. The number of effective pixels is 256(Horizontal) × 256(Vertical). The pixel array consists of 32(H) × 32(V) sub-imagers each of which has 8(H) × 8(V) pixels. The pixel is an ordinary 4-transistor active pixel sensor using a pinned photodiode and the pixel size is 7.5μm × 7.5μm with a fillfactor of 45%. The basic operations such as normal image acquisition and selective pixel readout were experimentally confirmed. The sensitivity and the pixel conversion gain were 25.9 ke^-/lx•sec and 70 μV/e^- respectively.

Citation Download Citation

Min-Woong Seo, An Wang, Zhuo Li, Keita Yasutomi, Keiichiro Kagawa, and Shoji Kawahito "A CMOS imager using focal-plane pinhole effect for confocal multibeam scanning microscopy", Proc. SPIE 8298, Sensors, Cameras, and Systems for Industrial and Scientific Applications XIII, 829807 (15 February 2012); https://doi.org/10.1117/12.908285

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KEYWORDS

Confocal microscopy

Imaging systems

Microscopes

Microscopy

Sensors

Photodiodes

CMOS sensors

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