A new single-photon avalanche diode in 90nm standard CMOS technology

Mohammad Azim Karami; Marek Gersbach; Edoardo Charbon

doi:10.1117/12.859435

26 August 2010 A new single-photon avalanche diode in 90nm standard CMOS technology

Mohammad Azim Karami, Marek Gersbach, Edoardo Charbon

Proceedings Volume 7780, Detectors and Imaging Devices: Infrared, Focal Plane, Single Photon; 77801F (2010) https://doi.org/10.1117/12.859435
Event: SPIE NanoScience + Engineering, 2010, San Diego, California, United States

Abstract

A single-photon avalanche diode (SPAD) fabricated in a 90nm standard CMOS process is reported. The detector comprises an octagonal multiplication region and a guard ring to prevent premature edge breakdown using exclusively standard layers. The proposed structure is the result of a systematic study aimed at miniaturization, while optimizing overall performance. The device exhibits a dark count rate of 16 kHz at room temperature, a maximum photon detection probability of 16% and the jitter of 398ps at a wavelength of 637nm. Applications include time-of-flight 3D vision, fluorescence lifetime imaging microscopy, fluorescence correlation spectroscopy, and time-resolved gamma/X-ray imaging. Standard characterization of the SPAD was performed in different bias voltages and temperatures.

Citation Download Citation

Mohammad Azim Karami, Marek Gersbach, and Edoardo Charbon "A new single-photon avalanche diode in 90nm standard CMOS technology", Proc. SPIE 7780, Detectors and Imaging Devices: Infrared, Focal Plane, Single Photon, 77801F (26 August 2010); https://doi.org/10.1117/12.859435

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available