Bound-abrasive grinding and polishing of surfaces of optical materials

Yuriy D. Filatov; Olexandr Yu. Filatov; Guy Monteil; Uwe Heisel; Michael Storchak

doi:10.1117/12.860471

19 August 2010 Bound-abrasive grinding and polishing of surfaces of optical materials

Yuriy D. Filatov, Olexandr Yu. Filatov, Guy Monteil, Uwe Heisel, Michael Storchak

Proceedings Volume 7786, Current Developments in Lens Design and Optical Engineering XI; and Advances in Thin Film Coatings VI; 778613 (2010) https://doi.org/10.1117/12.860471
Event: SPIE Optical Engineering + Applications, 2010, San Diego, California, United States

Abstract

Problems of improving efficiency and quality of diamond-abrasive finishing of optical materials by tools with bounded polishing powders, including diamond powder, by means of the improvement of the machining technology and application of new tools with functionally oriented designs and characteristics of working layer are considered. A model has been proposed of the slime particle formation and directional removal as well as of the generation of a high-quality surface in diamond-abrasive finishing of optical materials taking into account the peculiarities of the mass transfer in the contact zone and statistic character of the distribution of slime particles by size. The dependences of the particle number on the diffusion angle and coordinate of the contact have been derived in the studies of the dynamics of collision and diffusion of slime particles. The coordinate dependence of the flat surface roughness of glass K8 optics in fine diamond grinding has been described. Interaction and dispersion of deterioration particles in a contact zone of the tool and a processed sample in the course of polishing is described and the dispersion structure of deterioration particles of the tool on slime particles and on deterioration particles is explained oscillatory. It is shown, that differential dispersion section of deterioration particles on slime particles no less than on deterioration particles as much as possible at corners of dispersion close to 0 and 180° on the central sites of a contact zone. Coordinate dependence of full dispersion section of deterioration particles of the tool and dependence of microprofile height of the processed surface on circular zones radius are calculated. Conformity of experimental and theoretical microroughness profiles of a polished surface on a quartz sample is shown.

Citation Download Citation

Yuriy D. Filatov, Olexandr Yu. Filatov, Guy Monteil, Uwe Heisel, and Michael Storchak "Bound-abrasive grinding and polishing of surfaces of optical materials", Proc. SPIE 7786, Current Developments in Lens Design and Optical Engineering XI; and Advances in Thin Film Coatings VI, 778613 (19 August 2010); https://doi.org/10.1117/12.860471

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