Multilayer light guide films(MLGF) with LED lighting for multifunctional display has been proposed. Based on the MLGF technology, keys can be illuminated separately on different mode. The fabrication process similar to LIGA technology including laser etching, electroforming and hot nanoimprinting is developed. The depth of the light guide dots can be controlled by laser pulse numbers and the influence of dots depth to the luminance uniformity is simulated. The MLGF sample composed of 2 layers is designed and fabricated, the total thickness the module is about 0.4mm and the depth of light guide dots ranges from 0.5 um to 10um.The optical performances testing results are given. MLGF provides an ultrathin solution for multifunctional keypad and the fabrication process is high throughput, low cost for large area light guide films.© (2010) COPYRIGHT SPIE--The International Society for Optical Engineering. Downloading of the abstract is permitted for personal use only.