Tunable mid-infrared filter based on Fabry-Perot interferometer with two movable reflectors

Marco Meinig; Steffen Kurth; Karla Hiller; Norbert Neumann; Martin Ebermann; Elvira Gittler; Thomas Gessner

doi:10.1117/12.875428

14 February 2011 Tunable mid-infrared filter based on Fabry-Perot interferometer with two movable reflectors

Marco Meinig, Steffen Kurth, Karla Hiller, Norbert Neumann, Martin Ebermann, Elvira Gittler, Thomas Gessner

Proceedings Volume 7930, MOEMS and Miniaturized Systems X; 79300K (2011) https://doi.org/10.1117/12.875428
Event: SPIE MOEMS-MEMS, 2011, San Francisco, California, United States

Abstract

A tunable IR filter based on a Fabry-Perot interferometer with two movable reflectors is reported. The infrared filter can be tuned over a wavelength range from 8 μm to 11 μm with voltages lower than 63 V. The FWHM bandwidth is lower than 200 nm and the peak transmittance is larger than 70 %. Simulation and practical shock test, both showed that the device can withstand 1500 g, 0.5 ms shocks according to Mil-Std-883G, method 2002.4, test condition B. The new infrared filter measures 8.5 mm x 8.5 mm and is suitable for the integration in a TO-8 housing in combination with a broadband infrared detector. The design benefits from relatively low stiffness of the mirror suspensions, compensation of vibration and gravitation induced forces possibly influencing the central wavelength and much lower actuation voltages as a result. Both reflector carriers are movable and are actuated by electrostatic forces.

Citation Download Citation

Marco Meinig, Steffen Kurth, Karla Hiller, Norbert Neumann, Martin Ebermann, Elvira Gittler, and Thomas Gessner "Tunable mid-infrared filter based on Fabry-Perot interferometer with two movable reflectors", Proc. SPIE 7930, MOEMS and Miniaturized Systems X, 79300K (14 February 2011); https://doi.org/10.1117/12.875428

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available