MEMS DM development at Iris AO, Inc.

Michael A. Helmbrecht; Min He; Carl J. Kempf; Marc Besse

doi:10.1117/12.876186

14 February 2011 MEMS DM development at Iris AO, Inc.

Michael A. Helmbrecht, Min He, Carl J. Kempf, Marc Besse

Proceedings Volume 7931, MEMS Adaptive Optics V; 793108 (2011) https://doi.org/10.1117/12.876186
Event: SPIE MOEMS-MEMS, 2011, San Francisco, California, United States

Abstract

Iris AO is actively developing piston-tip-tilt (PTT) segmented MEMS deformable mirrors (DM) and adaptive optics (AO) controllers for these DMs. This paper discusses ongoing research at Iris AO that has advanced the state-of-the-art of these devices and systems over the past year. Improvements made to open-loop operation and mirror fabrication enables mirrors to open-loop flatten to 4 nm rms. Additional testing of an anti snap-in technology was conducted and demonstrates that the technology can withstand 100 million snap-in events without failure. Deformable mirrors with dielectric coatings are shown that are capable of handling 630 W/cm² of incident laser power. Over a localized region on the segment, the dielectric coatings can withstand 100kW/cm² incident laser power for 30 minutes. Results from the first-ever batch of PTT489 DMs that were shipped to pilot customers are reported. Optimizations made to the open-loop PTT controller are shown to have latencies of 157.5 μs and synchronous array update rates of nearly 6.5 kHz. Finally, plans for the design and fabrication of the next-generation PTT939 DM are presented.

Citation Download Citation

Michael A. Helmbrecht, Min He, Carl J. Kempf, and Marc Besse "MEMS DM development at Iris AO, Inc.", Proc. SPIE 7931, MEMS Adaptive Optics V, 793108 (14 February 2011); https://doi.org/10.1117/12.876186

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