Investigation of miniature fiber optic surface-mountable Fabry-Perot pressure sensor built on 45° angled fiber

H. Bae; M. Yu

doi:10.1117/12.880955

14 April 2011 Investigation of miniature fiber optic surface-mountable Fabry-Perot pressure sensor built on 45° angled fiber

H. Bae, M. Yu

Author Affiliations +

Proceedings Volume 7981, Sensors and Smart Structures Technologies for Civil, Mechanical, and Aerospace Systems 2011; 79812X (2011) https://doi.org/10.1117/12.880955
Event: SPIE Smart Structures and Materials + Nondestructive Evaluation and Health Monitoring, 2011, San Diego, California, United States

Abstract

We present a surface-mountable miniature Fabry-Perot (FP) pressure sensor that exploits the total internal reflection at a polished 45° angled fiber end face to swerve the optical axis by 90°. Optical analysis of the sensor system is performed based in ABCD method in terms of intensity of the beams reflected from each mirror and visibility of the sensor compared to conventional sensor system. One unique feature of the surface-mountable sensor is its embeddability with minimum intrusiveness to the system. By using the fiber as a waveguide, as well as an inherent mask for photolithography, a self-aligned FP cavity is constructed. A polymer-metal composite diaphragm is employed as a deflection diaphragm for pressure sensing which enables achieving higher sensitivity and low-cost fabrication over silicon diaphragm. The sensor exhibits a good linearity over the designed pressure range. Fiber Bragg grating is embedded in the vicinity of the pressure sensor to solve the problem of cross sensitivity between pressure and temperature by measuring the temperature of the system and compensating the temperature effect. This sensor is expected to impact many fronts where temperature effect should be considered to perform reliable and accurate pressure measurement with minimum intrusiveness.

Citation Download Citation

H. Bae and M. Yu "Investigation of miniature fiber optic surface-mountable Fabry-Perot pressure sensor built on 45° angled fiber", Proc. SPIE 7981, Sensors and Smart Structures Technologies for Civil, Mechanical, and Aerospace Systems 2011, 79812X (14 April 2011); https://doi.org/10.1117/12.880955

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