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Proceedings Article

Development of hybrid type pneumatic vibration isolation table by piezo-stack actuator and filtered-X LMS algorithm

[+] Author Affiliations
Yun-ho Shin, Seok-jun Moon, Chang-kyu Song

Korea Institute of Machinery & Materials (Korea, Republic of)

Dong-doo Jang, Hyung-Jo Jung

KAIST (Korea, Republic of)

Yeong-jong Moon

Samsung Electronics Co., Ltd. (Korea, Republic of)

Proc. SPIE 7981, Sensors and Smart Structures Technologies for Civil, Mechanical, and Aerospace Systems 2011, 79813H (April 15, 2011); doi:10.1117/12.881203
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From Conference Volume 7981

  • Sensors and Smart Structures Technologies for Civil, Mechanical, and Aerospace Systems 2011
  • Masayoshi Tomizuka
  • San Diego, California, USA | March 06, 2011

abstract

Recently, vibration requirements are getting stricter as precise equipments need more improved vibration environment to realize their powerful performance. Though the passive pneumatic vibration isolation tables are frequently used to satisfy the rigorous vibration requirements, the specific vibration problem, especially continuous sinusoidal or periodic vibration induced by a rotor system of other precise equipment, a thermo-hygrostat or a ventilation system, is still left. In this research, the application procedure of Filtered-X LMS algorithm to pneumatic vibration isolation table with piezo-stack actuators is proposed to enhance the isolation performance for the continuous sinusoidal or periodic vibration. In addition, the experimental results to show the isolation performance of proposed system are also presented together with the isolation performance of passive pneumatic isolation table.

© (2011) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Citation

Yun-ho Shin ; Dong-doo Jang ; Seok-jun Moon ; Hyung-Jo Jung ; Yeong-jong Moon, et al.
"Development of hybrid type pneumatic vibration isolation table by piezo-stack actuator and filtered-X LMS algorithm", Proc. SPIE 7981, Sensors and Smart Structures Technologies for Civil, Mechanical, and Aerospace Systems 2011, 79813H (April 15, 2011); doi:10.1117/12.881203; http://dx.doi.org/10.1117/12.881203


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