Development of hybrid type pneumatic vibration isolation table by piezo-stack actuator and filtered-X LMS algorithm

Yun-ho Shin; Dong-doo Jang; Seok-jun Moon; Hyung-Jo Jung; Yeong-jong Moon; Chang-kyu Song

doi:10.1117/12.881203

15 April 2011 Development of hybrid type pneumatic vibration isolation table by piezo-stack actuator and filtered-X LMS algorithm

Yun-ho Shin, Dong-doo Jang, Seok-jun Moon, Hyung-Jo Jung, Yeong-jong Moon, Chang-kyu Song

Author Affiliations +

Proceedings Volume 7981, Sensors and Smart Structures Technologies for Civil, Mechanical, and Aerospace Systems 2011; 79813H (2011) https://doi.org/10.1117/12.881203
Event: SPIE Smart Structures and Materials + Nondestructive Evaluation and Health Monitoring, 2011, San Diego, California, United States

Abstract

Recently, vibration requirements are getting stricter as precise equipments need more improved vibration environment to realize their powerful performance. Though the passive pneumatic vibration isolation tables are frequently used to satisfy the rigorous vibration requirements, the specific vibration problem, especially continuous sinusoidal or periodic vibration induced by a rotor system of other precise equipment, a thermo-hygrostat or a ventilation system, is still left. In this research, the application procedure of Filtered-X LMS algorithm to pneumatic vibration isolation table with piezo-stack actuators is proposed to enhance the isolation performance for the continuous sinusoidal or periodic vibration. In addition, the experimental results to show the isolation performance of proposed system are also presented together with the isolation performance of passive pneumatic isolation table.

Citation Download Citation

Yun-ho Shin, Dong-doo Jang, Seok-jun Moon, Hyung-Jo Jung, Yeong-jong Moon, and Chang-kyu Song "Development of hybrid type pneumatic vibration isolation table by piezo-stack actuator and filtered-X LMS algorithm", Proc. SPIE 7981, Sensors and Smart Structures Technologies for Civil, Mechanical, and Aerospace Systems 2011, 79813H (15 April 2011); https://doi.org/10.1117/12.881203

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