The cost and size of the state-of-the-art health and usage monitoring systems (HUMS) are determined by capacity of on-board energy storage which limits their large scale deployment. In this paper, we present a miniature low-cost mechanical HUMS integrated circuit (IC) based on the concept of hybrid energy harvesting where continuous monitoring is achieved by self-powering, where as the programming, localization and communication with the sensor is achieved using remote RF powering. The self-powered component of the proposed HUMS is based on our previous result which used a controllable hot electron injection on floatinggate transistor as an ultra-low power signal processor. We show that the HUMS IC can seamlessly switch between different energy harvesting modes based on the availability of ambient RF power and that the configuration, programming and communication functions can be remotely performed without physically accessing the HUMS device. All the measured results presented in this paper have been obtained from prototypes fabricated in a 0.5 micron standard CMOS process and the entire system has been successfully integrated on a 1.5cm x 1.5cm package.© (2011) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.