Development of micro-pump for bio-MEMS by using new bio-compatible piezoelectric material MgSiO3

Noriaki Okamoto; Hwisim Hwang; Yusuke Morita; Eiji Nakamachi

doi:10.1117/12.881760

18 April 2011 Development of micro-pump for bio-MEMS by using new bio-compatible piezoelectric material MgSiO₃

Noriaki Okamoto, Hwisim Hwang, Yusuke Morita, Eiji Nakamachi

Proceedings Volume 7981, Sensors and Smart Structures Technologies for Civil, Mechanical, and Aerospace Systems 2011; 798152 (2011) https://doi.org/10.1117/12.881760
Event: SPIE Smart Structures and Materials + Nondestructive Evaluation and Health Monitoring, 2011, San Diego, California, United States

Abstract

In this study, a micro-pump for Bio-MEMS by using a new bio-compatible piezoelectric thin film is newly developed, which could be built in DDS and HMS. At first, we carried out the performance assessment of our piezoelectric thin film pump of a newly designed micro-fluid system by using the finite element method, which can consider the interaction between the piezoelectric solid and the fluid. The results of numerical analyses show a enough transportation ability of our micro-pump system. Then, we generate multilayer MgSiO₃ thin film on Cu/Ti/Si(100) substrate by using RFmagnetron sputtering method. We measured the crystallographic orientation and piezoelectric property and confirmed that MgSiO₃(101) crystal has grown well. The strain constant d₃₃ was calculated by using the displacement-voltage curve, such as 179.4pm/V. Further, the deflection and frequency of the monomorph-actuator, which fabricated by using the micro-machining process, were measured by the laser doppler vibrometer. It showed that the deflection linearly increased with applied voltage, and it was 82.6nm with the applied voltage of 15V. We evaluated the flow rate of micropump using the luminance difference measurement method. The results showed that the maximum flow rate was 7.1nl/s at the applied voltage of 15V. It shows the possibility of Bio-MEMS device by using our newly developed micro-pump with a new bio-compatible piezoelectric material MgSiO₃.

Citation Download Citation

Noriaki Okamoto, Hwisim Hwang, Yusuke Morita, and Eiji Nakamachi "Development of micro-pump for bio-MEMS by using new bio-compatible piezoelectric material MgSiO₃", Proc. SPIE 7981, Sensors and Smart Structures Technologies for Civil, Mechanical, and Aerospace Systems 2011, 798152 (18 April 2011); https://doi.org/10.1117/12.881760

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