High temperature sensors play a significant role in aerospace, automotive and energy industries. In this paper, a shearmode piezoelectric accelerometer using YCa4O(BO3)3 single crystals (YCOB) was designed and fabricated for high temperature sensing applications. The prototype sensor was tested at the temperature ranging from room temperature to 1000°C. The sensitivity of the sensor was found to be 1.9±04 pC/g throughout the tested frequency and temperature range. Moreover, YCOB piezoelectric accelerometers remained stable performance at 1000°C for a dwell time of three hours.© (2011) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.