Full Content is available to subscribers

Subscribe/Learn More  >
Proceedings Article

Comparison of TiO2-doped SiO2 films from two organosilicon precursors

[+] Author Affiliations
Jaspal P. Bange

Gunma Univ. (Japan)

Lalit S. Patil, D. K. Gautam

North Maharashtra Univ. (India)

Proc. SPIE 7986, Passive Components and Fiber-Based Devices VII, 79860S (January 19, 2011); doi:10.1117/12.888153
Text Size: A A A
From Conference Volume 7986

  • Passive Components and Fiber-Based Devices VII
  • Perry P. Shum
  • Shanghai, China | December 08, 2010

abstract

In present work the effect of two different source of silicon Tetraethylorthosilicate and Octamethylcyclotetrasiloxane on TiO2-doped SiO2 films have been studied. The study reveals that film properties depend on the precursors used for deposition. The deposited films are crystalline with broad peak between 2θ = 20° - 30° corresponding to SiO2 and two strong peak appearing at 2θ = 38.3° and 2θ = 44.6° due to the (004) anatase phase and (210) rutile phase of TiO2. It is also clear from the SEM study that the particle size of films deposited using TEOS are smaller than the one deposited by OMCTS.

© (2010) COPYRIGHT SPIE--The International Society for Optical Engineering. Downloading of the abstract is permitted for personal use only.

Topics

Particles ; Silicon
Citation

Jaspal P. Bange ; Lalit S. Patil and D. K. Gautam
"Comparison of TiO2-doped SiO2 films from two organosilicon precursors", Proc. SPIE 7986, Passive Components and Fiber-Based Devices VII, 79860S (January 19, 2011); doi:10.1117/12.888153; http://dx.doi.org/10.1117/12.888153


Access This Proceeding
Sign in or Create a personal account to Buy this proceeding ($15 for members, $18 for non-members).

Figures

Tables

NOTE:
Citing articles are presented as examples only. In non-demo SCM6 implementation, integration with CrossRef’s "Cited By" API will populate this tab (http://www.crossref.org/citedby.html).

Some tools below are only available to our subscribers or users with an online account.

Related Content

Customize your page view by dragging & repositioning the boxes below.

Related Book Chapters

Advertisement
  • Don't have an account?
  • Subscribe to the SPIE Digital Library
  • Create a FREE account to sign up for Digital Library content alerts and gain access to institutional subscriptions remotely.
Access This Proceeding
Sign in or Create a personal account to Buy this proceeding ($15 for members, $18 for non-members).
Access This Proceeding
Sign in or Create a personal account to Buy this article ($15 for members, $18 for non-members).
Access This Chapter

Access to SPIE eBooks is limited to subscribing institutions and is not available as part of a personal subscription. Print or electronic versions of individual SPIE books may be purchased via SPIE.org.