Full Content is available to subscribers

Subscribe/Learn More  >
Proceedings Article

Effects of annealing on the structural properties of Cu(In,Ga)Se2 thin films prepared by RF sputtering

[+] Author Affiliations
Gang Shi, Junhao Chu

Shanghai Institute of Technical Physics (China)

Proc. SPIE 7995, Seventh International Conference on Thin Film Physics and Applications, 79950A (February 17, 2011); doi:10.1117/12.888168
Text Size: A A A
From Conference Volume 7995

  • Seventh International Conference on Thin Film Physics and Applications
  • Junhao Chu; Zhanshan Wang
  • Shanghai, China | September 24, 2010

abstract

Cu(In,Ga)Se2 (CIGS) thin films have been prepared by radio frequency (RF) magnetron sputtering from a CuIn0.8Ga0.2Se2 target. The effects of in-situ annealing in Ar atmosphere on phase structure, composition and surface morphology of the films have been investigated by X-ray diffraction (XRD), energy dispersive analysis of X-rays (EDAX), atomic force microscopy (AFM) and Raman spectroscopy. XRD patterns show that both as-deposited and annealed films have a chalcopyrite structure with strong (112) preferred orientation. The annealed films display a higher degree of crystallinity and smoother surface, while there is little difference in grain size for films annealed at temperatures ranging from 300°C to 500°C. Results of EDAX reveal that the films are near to stoichiometry. Raman spectrum of the films annealed at 300°C shows only the CIGS A1 mode peak indicating the formation of single-phase chalcopyrite with enhanced crystalline ordering. The films annealed at higher temperatures exhibit a non-chalcopyrite mode at around 260 cm-1 assigned to Cu2-xSe secondary phase which is detrimental to CIGS solar cells.

© (2010) COPYRIGHT SPIE--The International Society for Optical Engineering. Downloading of the abstract is permitted for personal use only.
Citation

Gang Shi and Junhao Chu
"Effects of annealing on the structural properties of Cu(In,Ga)Se2 thin films prepared by RF sputtering", Proc. SPIE 7995, Seventh International Conference on Thin Film Physics and Applications, 79950A (February 17, 2011); doi:10.1117/12.888168; http://dx.doi.org/10.1117/12.888168


Access This Proceeding
Sign in or Create a personal account to Buy this proceeding ($15 for members, $18 for non-members).

Figures

Tables

NOTE:
Citing articles are presented as examples only. In non-demo SCM6 implementation, integration with CrossRef’s "Cited By" API will populate this tab (http://www.crossref.org/citedby.html).

Some tools below are only available to our subscribers or users with an online account.

Related Content

Customize your page view by dragging & repositioning the boxes below.

Related Book Chapters

Topic Collections

Advertisement
  • Don't have an account?
  • Subscribe to the SPIE Digital Library
  • Create a FREE account to sign up for Digital Library content alerts and gain access to institutional subscriptions remotely.
Access This Proceeding
Sign in or Create a personal account to Buy this proceeding ($15 for members, $18 for non-members).
Access This Proceeding
Sign in or Create a personal account to Buy this article ($15 for members, $18 for non-members).
Access This Chapter

Access to SPIE eBooks is limited to subscribing institutions and is not available as part of a personal subscription. Print or electronic versions of individual SPIE books may be purchased via SPIE.org.