Crystallization of amorphous silicon films by a Nd:YAG laser and correlated surface morphology

Jing Jin; Lu Huang; Zhijun Yuan; Weimin Shi; Zechun Cao; Jun Zhou

doi:10.1117/12.888222

18 February 2011 Crystallization of amorphous silicon films by a Nd:YAG laser and correlated surface morphology

Jing Jin, Lu Huang, Zhijun Yuan, Weimin Shi, Zechun Cao, Jun Zhou

Proceedings Volume 7995, Seventh International Conference on Thin Film Physics and Applications; 79950E (2011) https://doi.org/10.1117/12.888222
Event: Seventh International Conference on Thin Film Physics and Applications, 2010, Shanghai, China

Abstract

The phosphorous (P)-doped hydrogenated amorphous silicon (a-Si:H) thin films were crystallized by a frequency-doubled (λ=532 nm) Nd:YAG pulsed nanosecond laser with laser beam shaping system introduced by a fly-eye lens array. The correlations among crystallization, stress and microstructures with surface morphology during crystallization process can be determined. The increased crystalline fraction (X_C) is realized by a considerable stress release. It is observed that the periodic two dimensional grid patterns with the period of about 15 μm are formed at laser energy density (E_L) of 740 mJ/cm² and are very sensitive to the energy density. Further increasing laser energy density to laser ablation can give rise to the irradiation damage on the film with poor crystalline quality and high surface roughness.

Citation Download Citation

Jing Jin, Lu Huang, Zhijun Yuan, Weimin Shi, Zechun Cao, and Jun Zhou "Crystallization of amorphous silicon films by a Nd:YAG laser and correlated surface morphology", Proc. SPIE 7995, Seventh International Conference on Thin Film Physics and Applications, 79950E (18 February 2011); https://doi.org/10.1117/12.888222

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available